Application of Sector Fresnel Zone Plates to Video Based Alignment in X-ray Lithography.
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چکیده
منابع مشابه
Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates
A growing number of X-ray sources based on the free-electron laser (XFEL) principle are presently under construction or have recently started operation. The intense, ultrashort pulses of these sources will enable new insights in many different fields of science. A key problem is to provide x-ray optical elements capable of collecting the largest possible fraction of the radiation and to focus i...
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Fresnel-zone-plate-based optics is extensively applied for x-ray instruments. At the Advanced Photon Source (APS) at Argonne National Laboratory (ANL), many synchrotron radiation beamlines are using Fresnel zone plates for hard x-ray focusing. However, the efficiency of Fresnel zone plates (FZPs) as focusing optics for x-rays depends on the height of the structures. In the hard x-ray regime, ve...
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A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100 nm and structures of 1 lm height are fabricated. Preliminary focusing results at an X-ray energy of 8 keV are presented and ways to improve the zone plate parameters are discussed. 2007 Elsevier B.V. All rights reserved.
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of the Dissertation NANOFABRICATION OF FRESNEL ZONE PLATES FOR SOFT X-RAY IMAGING AT CARBON EDGE
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2001
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.67.235