Analysis of Capacitive Microelectromechanical System Accelerometer Proposed with Voltage Reference in Read-Out Circuit

Differential read-out circuit for capacitive sensors

Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method, combines elementary capacitive pickup electrodes with periodic-sensing-array transducers. In or...

Read-out calibration of a SOI capacitive transducer using the pull-in voltage

The pull-in voltage of a parallel plate electrostatic transducer is used to determine the amount of over-etching in fabricated devices. A detailed analysis of the capacitor behaviour over the full displacement range yields a model, which is used to describe the relation between over-etching and measured pull-in voltage. SEM photos confirm the over-etching measurement based on pull-in voltage. T...

Multi-sensor Read-out Circuit with Temperature, Capacitance and Voltage Sensing Functionalities

Model Reduction for Pull-in Voltage Analysis of SOI MEMS based Capacitive Accelerometer

In general, MEMS accelerometers fabrication relies more on trial and error than on clear design principles. Since the trial and error basis fabrication and testing of a MEMS are extremely costly, comprehensive modeling and simulation can be valuable tool to evaluate different designs and perform parametric studies each MEMS design before actual fabrication. This paper presents work done for SOI...