An investigation on the mechanical properties of soft magnetostrictive FeCoCr films by nanoindentation

Mechanical properties of soft magnetostrictive FeCo-based thin films is one the critical along with their magnetic properties. To fully exploit potential in magnetic-microelectromechanical (MagMEMs) application, elastic and inelastic as well strength need to be considered. This paper presents mechanical FeCoCr at varied Cr concentrations from 2.6 9.6 at% fabricated by RF Sputtering. Nanoindentation was performed determine hardness, recovery, Young’s modulus, yield FeCo films. Although substitutions slightly reduced hardness Modulus, improved, a maximum 1014 MPa for Cr. suggests that atoms were responsible inhibiting dislocations motion helped overcome brittleness FeCo.