An Improved 4H-SiC MESFET with a Partially Low Doped Channel
نویسندگان
چکیده
منابع مشابه
Observation of glassy ferromagnetism in Al-doped 4H-SiC.
Glassy ferromagnetism is observed in diluted magnetic semiconductor Al-doped 4H-SiC. We propose a possible explanation for the origin of ferromagnetism order that is the coeffect of sp(2)/sp(3) configuration along with the structural defects. This result unambiguously demonstrates the existence of intrinsic ferromagnetism order in nonmagnetic sp systems.
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In this work, we investigate the impact of Al-implantation into n-MOSFET channel regions together with its p-doping concentration upon the mobility limiting scattering mechanisms in the channel. For this purpose, a study of the interface trap density, interface trapped charge density, field-effect mobility, and Hall mobility is carried out for normally-off n-MOSFETs with different doping profil...
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a CNRS, LAAS, 7 Avenue du Colonel Roche, F-31400 Toulouse, France b Univ de Toulouse, UPS, LAAS, F-31400 Toulouse, France c Université de Lyon, CNRS, Laboratoire AMPERE, UMR 5005, INSA de Lyon, F-69621 Villeurbanne, France d Institut de Microelectrónica de Barcelona-Centre Nacional de Microelectrónica (IMB-CNM), Consejo Superior de Investigaciones Científicas (CSIC), Universitat Autònoma de Bar...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2019
ISSN: 2072-666X
DOI: 10.3390/mi10090555