An energy-efficient multistage charge pump for MEMS microphone

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

A MEMS Capacitive Microphone Modelling for Integrated Circuits

In this paper, a model for MEMS capacitive microphone is presented for integrated circuits.  The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no...

متن کامل

Area efficient CMOS charge pump circuits

This paper describes the operation of three types of charge pump circuits. Power efficiency theory of charge pumps is discussed. A method of estimating the output ripple of a charge pump from the size of the capacitors used is described. A new charge pump circuit that uses two cascoded buffer transistors to improve the area efficiency is proposed.

متن کامل

The Infineon Silicon MEMS Microphone

This paper reports on the state of the art silicon micromachined microphone utilizing a dual poly silicon membrane system. MEMS chips from 1.4mm down to 1.0mm side length are applied for mobile communication. Design aspects related with key performance parameters such as sensitivity, signal to noise ration and distortion are discussed. Sensitivity of -38BV/Pa is achieved for different microphon...

متن کامل

Modeling an Electrostatically Actuated MEMS Diaphragm Pump

The recent advent of microelectromechanical systems (MEMS) or micro-devices has generated excitement in many diverse fields. In the area of micro-fluidics liquid pumps are highly desirable for fluid transport and atomization. A recent and popular example of this is the inkjet, which self-aspirates ink from a reservoir and then transports it to a chamber for expulsion as a single droplet during ...

متن کامل

The Effect of Corrugations on Mechanical Sensitivity of Diaphragm for MEMS Capacitive Microphone

In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: IEICE Electronics Express

سال: 2017

ISSN: 1349-2543

DOI: 10.1587/elex.14.20170512