An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators
نویسندگان
چکیده
منابع مشابه
An Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators
Squeeze-film damping plays a significant role in the performance of micro-resonators because it determines their quality factors. Perforations in microstructures are often used to control the squeeze-film damping in micro-resonators. To model the perforation effects on the squeeze-film damping, many analytical models have been proposed, however, most of the previous models have been concerned w...
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ژورنال
عنوان ژورنال: Sensors
سال: 2015
ISSN: 1424-8220
DOI: 10.3390/s150407388