Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
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چکیده
منابع مشابه
Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
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ژورنال
عنوان ژورنال: Materials
سال: 2019
ISSN: 1996-1944
DOI: 10.3390/ma12030406