Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry
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چکیده
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ژورنال
عنوان ژورنال: Journal of Atomic, Molecular, and Optical Physics
سال: 2011
ISSN: 1687-9228,1687-9236
DOI: 10.1155/2011/295304