Advanced fluid modeling and PIC/MCC simulations of low-pressure ccrf discharges
نویسندگان
چکیده
منابع مشابه
Simulations of biomedical atmospheric-pressure discharges
Article history: Received 25 September 2008 Received in revised form 5 January 2009 Accepted 6 January 2009 Available online 8 January 2009 PACS: 52.65.Rr 52.65.Pp 52.80.Pi
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2017
ISSN: 1361-6595
DOI: 10.1088/1361-6595/aa5cce