Active Temperature Compensation for MEMS Capacitive Sensor
نویسندگان
چکیده
Temperature variations are one of the most crucial factors that need to be compensated for in MEMS sensors. Many traditional methodologies require an additional circuit compensate temperature. This work describes a new active temperature compensation method capacitive strain sensors without circuits. The proposed is based on complement 2-D structure design. It consumes zero-power, which essential toward realization low-power temperature-compensated sensor battery-powered or energy-harvesting applications. gauge factor developed 7. best result showing capacitance variation 1 ppm/°C compared with 13 conventional
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ژورنال
عنوان ژورنال: IEEE Sensors Journal
سال: 2021
ISSN: ['1558-1748', '1530-437X']
DOI: https://doi.org/10.1109/jsen.2021.3089056