Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators
نویسندگان
چکیده
منابع مشابه
1 Million Q-factor Demonstrated on Micro-glassblown Fused Silica Wineglass Resonators with Out-of-plane Electrostatic Transduction
In this paper, for the first time, we report Q-factor over 1 million, on both modes, and high frequency symmetry (∆f/f ) of 132 ppm on wafer-level micro-glassblown 3-D fused silica wineglass resonators at a compact size of 7 mm diameter and center frequency of 105 kHz. In addition, we demonstrate for the first time, out-ofplane capacitive transduction on MEMS wineglass resonators. High Q-factor...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2014
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2013.2286820