A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments
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منابع مشابه
A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments
A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be completely gastight. The wireless data is obtained with a reader antenna by mutual inductance couplin...
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Measurement technology for various key parameters in harsh environments (e.g., high-temperature and biomedical applications) continues to be limited. Wireless passive LC resonant sensors offer long service life and can be suitable for harsh environments because they can transmit signals without battery power or wired connections. Consequently, these devices have become the focus of many current...
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ژورنال
عنوان ژورنال: Sensors
سال: 2013
ISSN: 1424-8220
DOI: 10.3390/s130809896