A Squeeze-film Damping Model for the Circular Torsion Micro-resonators
نویسندگان
چکیده
منابع مشابه
Uncertainty quantification models for micro-scale squeeze-film damping
Two squeeze-film gas damping models are proposed to quantify uncertainties associated with the gap size and the ambient pressure. Modeling of gas damping has become a subject of increased interest in recent years due to its importance in micro-electro-mechanical systems (MEMS). In addition to the need for gas damping models for design of MEMS with movable micro-structures, knowledge of paramete...
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Squeeze-film damping plays a significant role in the performance of micro-resonators because it determines their quality factors. Perforations in microstructures are often used to control the squeeze-film damping in micro-resonators. To model the perforation effects on the squeeze-film damping, many analytical models have been proposed, however, most of the previous models have been concerned w...
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2017
ISSN: 1757-8981,1757-899X
DOI: 10.1088/1757-899x/224/1/012008