A single-layer micromachined tunable capacitor with an electrically floating plate
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Smart Materials and Structures
سال: 2016
ISSN: 0964-1726,1361-665X
DOI: 10.1088/0964-1726/25/4/045014