A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations

This paper presents a scale factor calibration method based on virtual accelerations generated by electrostatic force. uses series of voltage signals to simulate the inertial forces caused acceleration input, rather than frequent and laborious calibrations with high-precision instruments. The error transfer model this is systematically analyzed, geometrical parameters novel micromachined resonant accelerometer (MRA) are optimized. experimental results demonstrate that, referring traditional earth’s gravitational field tumble method, 0.46% within ±1 g using our method. Moreover, compensated accelerations. After compensation, maximum temperature drift decreases from 2.46 Hz/g 1.02 Hz/g, range 40 °C 80 °C.