A Novel Buckle‐Free Large Rib Microdisk with Submicrometer Thickness
نویسندگان
چکیده
Thin large microdisks, that are key for dense spectral microcomb generation at visible to UV wavelengths, face challenges in fabrication. One of the most difficult issues is buckling effect significantly reduces cavity optical quality factor. This work introduces a novel rib disk structure mitigates effects. Using this approach, we obtained millimeter size buckle-free microdisks with sub-micron thickness and high factor exceeding $10^7$.
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ژورنال
عنوان ژورنال: Advanced photonics research
سال: 2022
ISSN: ['2699-9293']
DOI: https://doi.org/10.1002/adpr.202200178