A Nodal Analysis Method for Laterally-Driven Electrothermal Microacutators
نویسندگان
چکیده
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1Landau Associates, 130 2nd Ave South, Edmonds, WA 98020, U.S.A. 2Civil and Environmental Engineering and National Center for Supercomputing Applications, University of Illinois at Urbana-Champaign, 205 North Mathews Ave Urbana, IL 61801, U.S.A. 3Department of Nuclear, Plasma and Radiological Engineering, University of Illinois at Urbana-Champaign, 216 Talbot Lab, 104 S. Wright St., Urbana, IL ...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/34/1/092