A Micromachined Nano tweezers Integrated with a Thermal Expansion Micro Actuator

Nano-positioning of a slender body using thermal actuator

Current rapid development in MEMS area has opened up many possibilities in nano-technology such as nano-fabrication. Among them is nanoscale wiring by both AFM (Atomic Force Microscope) tip and laser beam. Being able to make a relatively small deflection, a micro thermal actuator can be used to control the near field optics of the beam minutely and accurately. In this project, we will investiga...

A Novel Silicon Micromachined Integrated Mcm Thermal Management System

A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors

A compact two-dimensional micro scanner with small volume, large deflection angles and high frequency is presented and the two-dimensional laser scanning is achieved by specular reflection. To achieve large deflection angles, the micro scanner excited by a piezoelectric actuator operates in the resonance mode. The scanning frequencies and the maximum scanning angles of the two degrees of freedo...

Fabrication of Super Invar Micro- and Nano- Structures by Electrodeposition for Low Thermal Expansion Applications

5 wt % Co, are of both theoretical research and practical interest due to the anomalous codeposition behavior, the preferential deposition of less noble metal, and to the material's low coefficient of thermal expansion, CTE. A better understanding of anomalous codeposition allows for controlling the deposition rates of individual Fe, Ni, and Co metal during codeposition and hence the compositio...

Steam Reforming Integrated with Oxidation of Methanol in a Micro-Channel Reactor with Different Micro-Baffle Shapes

A micro-channel heat exchanger reactor with different micro-baffle shapes has been studied numerically. Governing equations were solved base on the finite volume method with FLUENT software. In upper section, oxidation reaction of methanol was occurred and in lower section, steam reforming of methanol was done. Two sections were separated with solid part which played as heat exchanger and trans...