A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits
نویسندگان
چکیده
منابع مشابه
A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits
This paper presents a micro-coordinate measuring machine (micro-CMM) for large-scale dimensional measurement of a micro-slit on a precision die coater by using a shear-mode micro-probe. A glass micro sphere with a nominal diameter of 52.3 μm was attached on one end of a tapered glass capillary tube as a probe tip ball. The micro-slit width of a slot die coater with a nominal slit width of 85 μm...
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This paper describes the fabrication of a series of micro ball-ended stylus tips by applying micro-EDM (Electrical Discharge Machining) and OPED (One Pulse Electrical Discharge) processes, followed by a manual assembly process of a static tri-switches tactile structure on a micro-CMM (Coordinate Measuring Machine). This paper further proves that the essential performance of the proposed system ...
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A high precision Micro-CMM (Coordinate measuring machine) is under development at the School of Instrument, Hefei University of Technology, in collaboration with National Taiwan University. The expected measuring range is 25 x 25 x 10 mm and the resolution is about 10 nm. For the enhancement of machine accuracy, some new design concepts are introduced, such as the arch-bridge and the co-planar ...
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A new high precision contact scanning probe possible to measure miniature components on a micro/nano-CMM is proposed. This contact probe is composed of a fiber stylus with a ball tip, a floating plate and focus sensors. The ball tip is fabricated using optical fiber with melting and solidification processes. The stylus is attached to a floating plate, which is connected to the probe housing via...
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ژورنال
عنوان ژورنال: Applied Sciences
سال: 2016
ISSN: 2076-3417
DOI: 10.3390/app6050156