A MEMS condenser microphone based acoustic receiver for totally implantable cochlear implants

A MEMS Capacitive Microphone Modelling for Integrated Circuits

In this paper, a model for MEMS capacitive microphone is presented for integrated circuits.  The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no...

FM for Cochlear Implants Chapter 12 Effects of FM Receiver Gain on Performance with Cochlear Implants

A High Sensitivity Polysilicon Diaphragm Condenser Microphone

This paper presents the analysis, design, fabrication, and testing of a condenser microphone utilizing a thin low-stress polycrystalline silicon diaphragm suspended above a p+ perforated back plate. The microphone is fabricated using a combination of surface and bulk micromachining techniques in a single wafer process without the need of wafer bonding. The device shows sensitivities of -34 dB (...

A MEMS Capacitive Accelerometer Design as Middle Ear Microphone Based on Ossicular Chain Micromechanic Characterization at Umbo for Fully Implantable Cochlear Prosthesis

An accelerometer attached to an umbo is proposed as a middle ear microphone for future fully implantable cochlear prostheses. The micromechanic characterization of cadaveric temporal bones indicates that a miniature accelerometer with a sensing resolution of 35 µg/ Hz, a bandwidth of 8 kHz, and a packaged weight less than 20 mg is required for detecting normal conversation, and that the acceler...

An Intracochlear Pressure Sensor as a Microphone for a Fully Implantable Cochlear Implant.

OBJECTIVE To validate an intracochlear piezoelectric sensor for its ability to detect intracochlear pressure and function as a microphone for a fully implantable cochlear implant. METHODS A polyvinylidene fluoride (PVDF) piezoelectric pressure sensor was inserted into a human fresh cadaveric round window at varying depths. An external sound pressure stimulus was applied to the external audito...