A MEMS-based electromagnetic membrane actuator utilizing bonded magnets with large displacement

In a previous study, microfabricated bonded magnets have been utilized in MEMS-based electromagnetic membrane actuators (EMMAs) to drive micropumps. However, maintain the flexibility of packing density spin-coated needed be small (6 vol%) and this together with strong self-demagnetization effect meant that force generated was weak. As result, maximum displacement achieved only several microns. To overcome problem, we proposed fabricating using micro compression molding soft mold order realize both high flexible membrane. The grooves (0.3 mm × 5 t0.3 mm) PDMS were filled mixture NdFeB magnetic powder wax powder. A 50 vol% for realized without undue influence on fine-pitch magnetization pattern also used decrease thereby improve actuator performance. experimental results show fabricated EMMAs (12 12 t1.1 2.2 mN 100 μm, respectively, at power consumption 4 W.