A hybrid surface tension seal for pneumatic and hydraulic microactuators
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چکیده
منابع مشابه
Pneumatic and hydraulic microactuators: a review
The development of MEMS actuators is rapidly evolving and continuously new progress in terms of efficiency, power and force output is reported. Pneumatic and hydraulic are an interesting class of microactuators that are easily overlooked. Despite the 20 years of research, and hundreds of publications on this topic, these actuators are only popular in microfluidic systems. In other MEMS applicat...
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ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2008
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-008-0756-3