A High-Speed Chip-Scale Rotary Polygon Optical Scanner Based on a Micromotor Integrated With a Micro-Polyhedron Mirror

Micro-opto-electro-mechanical systems (MOEMS) based mirrors with a suitable actuation range are often used for optical beam scanning applications. While several MOEMS scanners have been reported, they limitations respect to their of motion, field view, mass, size and fabrication cost. In this work, we present rotary micro-polygon scanner on an electrostatic variable capacitance micromotor laser steering The miniaturized consists hollow micro-polyhedron mirror base radius $200 {\mu }\text{m}$ height notation="LaTeX">$400 . It is mounted the rotor using epoxy-based adhesive. has diameter notation="LaTeX">$600 notation="LaTeX">$2.5 thick. was fabricated commercial three-layer polysilicon surface micro-machining process (PolyMUMPs) micro-polyhedrons were bulk (PiezeoMUMPs). After components, micro-scanner assembled operated under atmospheric conditions three-phase square wave excitation ranging from 0 V 200 achieved rotational speeds up 2100 rpm. An wavelength 632 nm reflected off sidewall rotating micro-polyhedron, achieving experimentally measured angular 57.88°, scan rate 220 radians per second speed 25,200 lines minute or 420 12 sided micro-mirror. ratio output power over input 22°, which limited by photo-detector, yielding spanning 0.18 0.22. This can provide high wide view footprint 1.25 mm 2 thickness 0.83 mm, implement chip-level high-performance micro-beam various [2022-0020]