A high-resolution micro-electro-mechanical resonant tilt sensor

Electro - Mechanical Resonant Magnetic Field Sensor

We describe a new type of magnetic field sensor which is termed an ElectroMechanical Resonant Sensor (EMRS). The key part of this sensor is a small conductive elastic element with low damping rate and therefore a high Q fundamental mode of frequency f1. An AC current is driven through the elastic element which, in the presence of a magnetic field, causes an AC force on the element. When the fre...

Waveguide micro-opto-electro-mechanical resonant chemical sensors.

We demonstrate a silicon micro-opto-electro-mechanical sensor based on mass-loading of a chemo-selective polymer coated onto a microbridge. The sensor is probed optically using an on-chip waveguide Fabry-Pérot interferometer for high resolution displacement and resonant frequency measurement. The mechanical resonator is designed with paddles to simplify chemo-selective polymer deposition and to...

A mechanical micro molecular mass sensor

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...

A mechanical micro molecular mass sensor

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...

Micro - Electro - Mechanical - Systems ( Mems )