A Heterodyne Interferometer for Simultaneous Measurement of Roll and Straightness
نویسندگان
چکیده
منابع مشابه
A dual-heterodyne laser interferometer for simultaneous measurement of linear and angular displacements.
Picometer laser interferometry is an essential tool for ultra-precision measurements in frontier scientific research and advanced manufacturing. In this paper, we present a dual-heterodyne laser interferometer for simultaneously measuring linear and angular displacements with resolutions of picometer and nanoradian, respectively. The phase measurement method is based on cross-correlation analys...
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ژورنال
عنوان ژورنال: IEEE Access
سال: 2019
ISSN: 2169-3536
DOI: 10.1109/access.2019.2941078