A fully automatic calibration for vision-based Selective Compliance Assembly Robot Arm and its application to intelligent wafer inspection scheduling

This study provides a complete Selective Compliance Assembly Robot Arm (SCARA) wafer inspection system. system mainly includes two phases. In the first phase, SCARA manipulator acts as an application platform, and depth camera is used to position vector of point cassette together with single-axis visual frame so that can automatically perform calibration in working area. second ready for optimized procedure sorting all detection items shortest time when process inspection. has solved problem calibrating positions area consumption manpower traditional field such way predetermined task economic benefits center without colliding addition, scheduling reduces tasks allow more wafers be inspected per unit time. Finally, relative points are calculated by placing not calibrated points. The predefined sent optimization calculation, experimental results presented SCARA.