A controlled atmosphere tube furnace was designed for thermal CVD
نویسندگان
چکیده
منابع مشابه
Effects of Furnace and Inlet Gas Mixture Temperature on Growing Carbon Nanotube in a CVD Reactor
Carbon nanotubes (CNTs), nowadays, are one of the important nanomaterials that can be produce with different methods such as chemical vapor deposition (CVD). Growing of CNTs via CVD method can be influenced by several operating parameters that can affect their quality and quantity. In this article, the effects of inlet gas mixture temperature on CNT’s local growth rate, total production, and le...
متن کاملEffects of Furnace and Inlet Gas Mixture Temperature on Growing Carbon Nanotube in a CVD Reactor
Carbon nanotubes (CNTs), nowadays, are one of the important nanomaterials that can be produce with different methods such as chemical vapor deposition (CVD). Growing of CNTs via CVD method can be influenced by several operating parameters that can affect their quality and quantity. In this article, the effects of inlet gas mixture temperature on CNT’s local growth rate, total production, and le...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2013
ISSN: 1742-6596
DOI: 10.1088/1742-6596/439/1/012020