34.1: Invited Paper: The laser annealing for crystallization of amorphous silicon using blue light semiconductor laser

Semiconductor blue laser diode was used for crystallization annealing of amorphous silicon backplane flat panel display. The grain size result crystal can be controlled by beam intensity or scanning speed. poly produced BLDA showed same characteristics as ELA in LTPS. Lateral have been BLDA, its field mobility is three times higher than ELA. A multiple head equipment proposed, which high performance TFT made with significantly lower cost comparing to conventional anneal technology.