3.1 Ion beam technology for micro fabrications
نویسندگان
چکیده
منابع مشابه
Focused Ion Beam Micro Machining and Micro Assembly
The ability to manufacture and manipulate components at the micro-scale is critical to the development of micro systems. This paper presents the technique to manipulate micro/nano parts at the micro/nano-scale using an integrated Focused Ion Beam (FIB) system composed of scanning electron microscope, micro manipulator and gas injection system. Currently the smallest gears manufactured with trad...
متن کاملMathematical Modeling for Thermoelastic Double Porous Micro-Beam Resonators
In the present work, the mathematical model of a homogeneous, isotropic thermoelastic double porous micro-beam, based on the Euler-Bernoulli theory is developed in the context of Lord-Shulman [1] theory of thermoelasticity. Laplace transform technique has been used to obtain the expressions for lateral deflection, axial stress, axial displacement, volume fraction field and temperature distribut...
متن کاملAdvanced Negative Ion Beam Technology to Improve the System Efficiency of Neutral Beam Injectors
Technologies producing high current density (>20mA/cm2) negative ions at a low operating gas pressure (<0.3Pa) has been established. Reduction of the gas pressure is efficient to improve the acceleration efficiency of neutral beam injectors. Beam optics in a multi-aperture, multi-stage electrostatic accelerator has been studied using a 400keV negative ion source. It was found that the ion beam ...
متن کاملPSFC/JA-06-31 Collisional bulk ion transport and poloidal rotation driven by neutral beam injection
Neutral beam injection (NBI) is known to significantly affect radial transport in a toka-mak plasma. However, the effect on collisional transport, accounting for strong toroidal plasma rotation, which is typical in the presence of NBI, had not been addressed. Furthermore , recent observations have shown poloidal velocities, in the presence of NBI, significantly in excess of the standard neoclas...
متن کاملMicro-channels over the glass surface made by interaction of Ar+ laser beam and Ag+/Na+ ion-exchanged glasses
Micro-channels are made over the Ag+/Na+ ion-exchanged soda-lime glass surface by interaction of an intense Ar+ laser beam and the silver ions inside the glass matrix. The Ar+ laser beam reduces the Ag+ ions inside the matrix. The Ag+ atoms aggregate into silver nano-clusters around the interaction area, inside the glass matrix. Aggregation of the silver atoms and the thermal effects of the int...
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ژورنال
عنوان ژورنال: RADIOISOTOPES
سال: 1995
ISSN: 1884-4111,0033-8303
DOI: 10.3769/radioisotopes.44.9_656