nowadays, atomic force microscope is considered as a useful tool in the determination of intermolecular forces and surface topography with the resolution of nanometers. in this kind of microscope, micro cantilever is considered as the heart of the microscope and is used as a measuring tool.  this paper is aimed towards investigating the behavior of a piezoelectric micro cantilever with a triang...

Nowadays, atomic force microscope is considered as a useful tool in the determination of intermolecular forces and surface topography with the resolution of nanometers. In this kind of microscope, micro cantilever is considered as the heart of the microscope and is used as a measuring tool.  This paper is aimed towards investigating the behavior of a piezoelectric micro cantilever with a triang...

the most promising method for micro scale energy scavenging is via vibration energy harvesting which converts mechanical energy to electrical energy by the effect of coupling between electric fields and mechanical variables. using piezoelectric cantilevers is the most common method for vibration energy harvesting. changing the shape of the cantilevers can lead to changing the generated output v...

A micro power generator for harvesting vibration energy by means of a piezoelectric laminated cantilever with inertial mass was designed, fabricated, and characterized. The device was micro machined from a silicon-on-insulator structure coated with a 2μm thick piezoelectric PZT thin film. Interdigitated electrodes (IDE) were applied to achieve higher voltages. A piezoelectric coupling constant ...

The image quality and resolution of the Atomic Force Microscope (AFM) operating in tapping mode is dependent on the quality (Q) factor of the sensing micro-cantilever. Increasing the cantilever Q factor improves image resolution and reduces the risk of sample and cantilever damage. Active piezoelectric shunt control is introduced in this work as a new technique for modifying the Q factor of a p...

Power supply is a bottle-neck problem of wireless micro-sensors, especially where the replacement of batteries is impossible or inconvenient. Now piezoelectric material is being used to harvest vibration energy for self-powered sensors. However, the geometry of a piezoelectric cantilever beam will greatly affect its vibration energy harvesting ability. This paper deduces a remarkably precise an...

This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it wit...

Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency s...

abstract: the main aim of the vibration energy harvesters is to locally power autonomous devices such as wireless sensors. generally, power levels are low and the environmental benefit of the technology is to replace batteries rather than saving energy per se. piezoelectric vibrational energy harvesters are usually inertial mass based devices, where a cantilever beam with a piezoelectric outer ...

This paper presents an analytical modeling of a piezoelectric multi-layer cantilever used as a micro-electro-mechanical-system (MEMS) chemical sensor. Selectively coated microcantilevers have been developed for highly sensitive chemical sensor applications. The proposed piezoelectric chemical sensor consists of an array of multi-layer piezoelectric cantilevers with voltage output in the millivo...