chemical vapor deposition (cvd) is one of the most important methods for producing carbon nanotubes (cnts). in this research, a numerical model, based on finite volume method, is investigated. the applied method solves the conservation of mass, momentum, energy and species transport equations with aid of ideal gas law. using this model, the growth rate and thickness uniformity of produced cnts,...

Chemical Vapor Deposition (CVD) is one of the most important methods for producing Carbon Nanotubes (CNTs). In this research, a numerical model, based on finite volume method, is investigated. The applied method solves the conservation of mass, momentum, energy and species transport equations with aid of ideal gas law. Using this model, the growth rate and thickness uniformity of produced CNTs,...

CD-PEB temperature experiments show that post-exposure bake (PEB) temperature non-uniformity (both in steady-state and transient phases) impacts across-wafer CD uniformity [1]. Continued improvement in CD uniformity requires across-wafer temperature uniformity for the entire PEB cycle. This poses new challenges for the design of PEB thermal modules. This paper proposes a novel PEB thermal modul...

Chemical Vapor Deposition (CVD) is one of the most important methods for producing Carbon Nanotubes (CNTs). In this research, a numerical model, based on finite volume method, is investigated. The applied method solves the conservation of mass, momentum, energy and species transport equations with aid of ideal gas law. Using this model, the growth rate and thickness uniformity of produced CNTs,...

Temperature profile on a spherical sample that is heated by laser beams in various geometries while processed in vacuum is analyzed. Sample heating by one or four laser beams was considered. An analytical expression was derived for directional sample heating cases. It suggests an enhanced temperature uniformity over the samples when heated with four diffuse laser beams arranged in a tetrahedral...

Pulse firing offers significant process and productivity benefits, such as improved temperature uniformity and high heat transfer rates to the product load through maximum system turndown and utilizes the system’s burners at their most efficient firing rates. However, overshoot and undershoot is unavoidable. To minimize these effects, the system operates the burner at an enhanced turndown rate....

The performance of proton-exchange membrane fuel cell cooling system using coolant flow channels enhanced with baffles was numerically investigated. To do this, the maximum temperature of the cooling plate, temperature uniformity and also pressure drop along the flow channels were compared for different cases associated with number of baffles and their dimensions inside the channels. The govern...