نتایج جستجو برای: RF Reactive Magnetron sputtering

تعداد نتایج: 196306  

2016
E Chudinova

Present paper reports on the results of surface modification of the additively manufactured porous Ti6Al4V scaffolds. Radio frequency (RF) magnetron sputtering was used to modify the surface of the alloy via deposition of the biocompatible hydroxyapatite (HA) coating. The surface morphology, chemical and phase composition of the HA-coated alloy were studied. It was revealed that RF magnetron sp...

2012
M. A. Shaheen D. N. Ruzic

Related Articles From sponge to dot arrays on (100) Ge by increasing the energy of ion impacts J. Vac. Sci. Technol. B 30, 06FF12 (2012) Ion-induced effects on grain boundaries and a-Si:H tissue quality in microcrystalline silicon films J. Vac. Sci. Technol. A 30, 061512 (2012) Negative oxygen ion formation in reactive magnetron sputtering processes for transparent conductive oxides J. Vac. Sci...

2003
D. J. Christie W. D. Sproul

Reactive co-sputtering is a means to create films of customized or graded index of refraction. This gives the optical coating designer new options, and enables practical realization of new classes of coatings. Two neighboring targets may be sputtered such that material from both targets and reactive gas are incident on the workpiece, depositing a film consisting of a compound. For example, if o...

Journal: :Applied optics 2005
Rabi Rabady Ivan Avrutsky

Mixing dielectric materials in solid-thin-film deposition allows the engineering of thin films' optical constants to meet specific thin-film-device requirements, which can be significantly useful for optoelectronics devices and photonics technologies in general. In principle, by use of radio-frequency (rf) magnetron sputtering, it would be possible to mix any two, or more, materials at differen...

2006
Shih Min Chou Lay Gaik Teoh Wei Hao Lai Yen Hsun Su Min Hsiung Hon

The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ~20 at an operating tempera...

2010
R Raju

An RF-assisted closed-field dual magnetron sputtering system was developed to characterize the plasma and the ionization fraction of sputtered material to provide a suitable system for depositing optical thin films on large-area substrates at low temperatures (<130 ◦C). The ‘prototype’ system consists of dual 76 mm dc magnetrons operated at both balanced and unbalanced (closed-field) configurat...

2013
M. R. Fishkis Richard D. Sisson Ronald R. Biederman

Microstructural features of sputtered chromium and chromium-50 wt. % platinum thin films on carbon substrates are presented. Films produced by rf sputtering and dc magnetron sputtering are compared using analytical electron microscopy techniques. All rf-sputtered films are uniform in chemistry and thickness and are amorphous. The chromium film became crystalline with a grain size ofless than 10...

2001
Ning Li J. P. Allain D. N. Ruzic

Reactive sputtering of aluminum oxide in a planar magnetron system is conducted with a mixture of O and Ar reacting with 2 and bombarding an aluminum target. The aluminum target is powered by a pulsed directed current (DC) bias which functions to discharge the accumulated ions on the insulating AlO film surface during the positive duty cycle and suppresses arc formation. x A seven-turn helical ...

نمودار تعداد نتایج جستجو در هر سال

با کلیک روی نمودار نتایج را به سال انتشار فیلتر کنید