The paper describes the performance analysis, structural design and fabrication of piezoresistive pressure sensor using simulation technique. A polysilicon double nano-wire piezoresistor was fabricated by means of RIE (reactive ion etching). The polysilicon double nanowire pressure sensor has 100x100nm cross section area and has a thickness about 10nm. Finite element method (FEM) is adopted to ...

The silicon based pressure sensor is one of the major applications of the piezoresistive sensor. This paper focuses on the structural design and optimization of the MEMS piezoresistive pressure sensor to enhance the sensitivity. A finite element method (FEM) is adopted for designing the performance of a silicon based piezoresistive pressure sensor. Thermal as well as pressure loading on the sen...

Traffic flow sensors are import devices to provide inputs for traffic management applications. This NATRL seed project explores the piezoresistive property of the CNT/cement composite and its feasibility as an embedded stress sensor for to detect traffic flow. The experimental results show that the electrical resistance of the CNT/cement composites changes proportionally to the compressive stre...

The field of piezoresistive sensors has been undergoing a significant revolution in terms of design methodology, material technology and micromachining process. However, the temperature dependence of sensor characteristics remains a hurdle to cross. This review focuses on the issues in thermal-performance instability of piezoresistive sensors. Based on the operation fundamental, inducements to ...

A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...

This article upgrades the RC linear model presented for piezoresistive force sensors. Amplitude nonlinearity is found in sensor conductance, and a characteristic equation is formulated for modeling its response under DC-driving voltages below 1 V. The feasibility of such equation is tested on four FlexiForce model A201-100 piezoresistive sensors by varying the sourcing voltage and the applied f...

A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...

In this paper, the prototyping of a new piezoresistive microforce sensor is presented. An original design taking advantage on both mechanical and bulk piezoresistive properties of silicon is presented and enables to easily fabricate a very small, large range, high sensitivity with high integration potential sensor. The sensor is made of two silicon strain gages for which widespread and known mi...

We have developed a simple, low-cost electronic interface suitable for use with piezoresistive microcantilever-based sensors. This interface uses the USB bus of any computer or laptop to communicate with the sensor via SPI commands. The primary user interface is LabView. We have used this system with several “embedded” piezoresistive microcantilever sensing applications, including both liquid-p...