In this article thermoelastic damping in nano-beam resonators is investigated based on nonlocal theory of elasticity and the Euler-Bernoulli beam assumptions. The governing equation of deflection of the beam is obtained from shear and moment resultants and stress–strain relationship of the nonlocal elasticity model and also the governing equations of thermoelastic damping are established by usi...

This research quantitatively investigates fluid damping of MEMS and NEMS flexural resonators such as scanning probe and carbon nano-tube resonators, aiming to improve the quality factor prediction and therefore the resonator design. Fluid damping in beam-type resonators is most affected by resonant frequency, device dimensions and cross-sectional shape which are systematically examined within. ...

In the design of high Quality factor (Q) micro or nano beam resonators, different dissipation mechanisms may have damaging effects on the quality factor. One of the major dissipation mechanisms is the thermoelastic damping (TED) that needs an accurate consideration for prediction. In this paper, thermoelastic damping of the longitudinal vibration of a homogeneous micro beam with both ends clamp...

We report on the fabrication and operation of a multi-element vibrational structure consisting of two graphene mechanical resonators coupled by a nanotube beam. The whole structure is suspended. Each graphene resonator is clamped by two metal electrodes. The structure is fabricated using a combination of electron-beam lithography and atomic-force microscopy nano-manipulation. This layout allows...

We report the fabrication of gold/polycarbonate (Au/PC) hybrid nano resonators on plastic substrates through a nano-transfer printing (nTP) technique, and the parametric studies of the resonant frequency of the resulting hybrid nano resonators. nTP is a nanofabrication technique that involves an assembly process by which a printable layer can be transferred from a transfer substrate to a device...

We show the results obtained from the fabrication and characterisation of MgB2 loops with two nano-bridges as superconducting weak links. These ring structures are made to operate as superconducting quantum interference devices and are investigated as readout system for cryogenics NEMS resonators. The nano-constrictions are fabricated by EBL and ion beam milling. The SQUIDs are characterised at...

Understanding the various mechanisms of nonlinear mode coupling in micro and nano resonators has become an imminent necessity for their successful implementation in practical applications. However, consistent, repeatable, and flexible experimental procedures to produce nonlinear mode coupling are lacking, and hence research into well-controlled experimental conditions is crucial. Here, we demon...

We have developed a process for the three-dimensional (3D) machining of p-type silicon on a microand nano-scale using high-energy ion beam irradiation with one or more energies and fluences, followed by electrochemical anodization in hydrofluoric acid. We present a study of the dependence of our fabricated structures on irradiating ion energies, fluences, geometries and wafer resistivity. All t...

It is well-known that the Interparticle interactions between adsorbates and surface of an adsorbent can affect the surface morphology. One of the consequences of this issue is that the resonant frequency of a nanoscale resonator can be changed due to adsorption. In this study we have chosen a cantilever-based nanoscale mass-sensor with a single nanoparticle at its tip. Using the classical...

many of nonlinear systems in the field of engineering such as nano-resonator and atomic force microscope can be modeled based on duffing equation. analytical frequency response of this system helps us analyze different interesting nonlinear behaviors appearing in its response due to its rich dynamics. in this paper, the general form of duffing equation with cubic nonlinearity as well as paramet...