This paper presents the design, fabrication, and experimental characterization of a peristaltic micropump. The micropump is composed of two layers fabricated from polydimethylsiloxane (PDMS) material. The first layer has a rectangular channel and two valve seals. Three rectangular mini lightweight piezo-composite actuators are integrated in the second layer, and used as actuation parts. Two lay...

A two-dimensional numerical simulation study has been performed to model an electrohydrodynamic (EHD) micropump. The micropump consists of an array of interdigitated electrodes along the top and bottom of the micropump channel. The focus of the simulations was to study the effects of electrode gap, stage gap, channel height, and applied voltage. The numerical results were first validated with e...

This paper aims to present the design, fabrication and test of a novel piezoelectric actuated, check-valves embedded micropump having the advantages of miniature size, light weight and low power consumption. This device is designed to pump gases and liquids with the capability of performing the self-priming and bubble-tolerant work mode by maximizing the stroke volume of the membrane as well as...

This paper presents the fabrication process of a single-chamber planar valveless micropump driven by an external electromagnetic actuator. This micropump features a pair of micro diffuser and nozzle elements used to rectify the fluid flow, and an elastic magnetic membrane used to regulate the pressure in the enclosed fluid chamber. Polydimethylsiloxane (PDMS) is used as the main construction ma...

This paper proposes and presents a novel ECF (electro-conjugate fluid) micropump with TPSEs (triangular prism and slit electrode pair) fabricated by electroforming process using newly developed self-aligned micro molds. ECF is a kind of functional and dielectric fluid. ECF micropump is based on the principle of ECF jet, which is a powerful and active jet flow generated between electrodes immerg...

A jet-type magnetically driven fluid micropump to drive conductive fluids has been designed, fabricated, and tested. The pump actuation is based on a rotary magnetic micromotor with fully integrated stator and coils operating with the rotor immersed in the fluid to be pumped, thereby driving the fluid from a inlet flow reservoir through integrated flow channels to an outlet flow reservoir. The ...

We present a valveless micropump in glass, which is magnetically actuated using the sinusoidal current of an external electromagnet. We employ a powder blasting microerosion process for microstructuring the glass substrates and fusion bonding for assembly of the multi-layered microfluidic chip. The reciprocating type micropump contains two nozzle/diffuser elements and a poly(dimethylsiloxane) m...

MEMS based Drug Delivery System (DDS) using an in-plane micropump enables us to make a compact, inexpensive system. This paper presents the new design of transdermal drug delivery system. A conceptual DDS design is proposed. This design consists of a unit which houses the micropump, electronic and power circuitry. This implantable unit is connected to a subcutaneous port via a silicone catheter...

A passive biomimic PDMS valve applied in thermopneumatic micropump is firstly designed and realized. Unlike the conventional peristaltic pumping configuration, the micropump consists of two stacking layers of PDMS on a glass slide. This sandwich-type structure builds up two chambers. A thermopneumatic actuation chamber consists of a 57 ohm heater on the glass slide; the other fluid chamber is c...

Utilizing an electronic–hydraulic analogy, this study develops an equivalent electrical network of a piezoelectric peristaltic micropump which has not been modeled the whole system operation completely by computational fluid dynamics (CFD) or equivalent electrical network so far due to its excessive complicated structure. The validity of the proposed model is verified by comparing the simulatio...