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Micro/nanocantilevers have been employed as sensors in many applications including chemical and biosensing. Due to their high sensitivity and potential for scalability, miniature sensing systems are in wide use and will likely become more prevalent in micro/nano-electromechanical systems (M-NEMSs). This paper is mainly focused on the use of sensing systems that employ micro/nano-size cantilever...

223 words) .......................................................................................................... 2 INTRODUCTION (758 words) .................................................................................................. 3 A CRITICAL LITERATURE REVIEW (1867 words) .................................................................... 6 SUMMARY AND CONCLUSION (682 words) ......

MEMS and NEMS use application is growing their market expanding. With the development of 5G IoT technologies number components always increasing. In this paper an introduction to MEMS/NEMS definition, categories, advantages. Fabrication techniques are discussed. Finally, elaborative analysis different applications MEMS/NEMS, followed by a discussion future Micro / Nano electromechanical Systems.

ABB Automation is starting to experiment with Microelectrical Mechanical Systems (MEMS) as an enabling technology for their products. If ABB's implementation of MEMS is found successful, it will be able to create breakhrough products and services that will revolutionize the market in ABB's industrial sensors, instrumentation and analytical areas. The thesis begins with a description of ABB as a...

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order modeling (ROM)

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order modeling (ROM)