The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena appear and interact. Because of their microscopic scale, strong coupling effects arise between the different physical fields, and some forces, which were negli...

in this paper, a robust pid control scheme is proposed for micro-electro-mechanical-systems(mems) optical switches. the proposed approach is designed in a way which solves twochallenging and important problems. the first one is successful reference tracking and the second ismitigating the system nonlinearities. the overall system composed of nonlinear mems dynamicsand the pid controller is prov...

fabrication, characterization and application of micro-/nano-rods/wires are among the hottest topics in materials science and applied physics. micro-/nano-rod-based structures and devices are developed for a wide-ranging use in various fields of micro-/nanoscience (e.g. biology, electronics, medicine, optics, optoelectronics, photonics and sensors). it is well known that the structure and prope...

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.

In this paper we present a complete methodology for efficient electro-mechanical characterization of a CMOS compatible MEMS technology. Using an original test structure, the so-called “U-shape cantilever beam,” we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanical relations for the d...

this paper addresses the problem of the fractional sliding mode control (fsmc) for a mems optical switch. the proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. after a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

this paper presents a comprehensive case study on electro-mechanical analysis of mems[1] variable capacitors. using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. the analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. a complete set of equations defining dynamic behavior of ...

Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application field...

As micro-device application in consumer and commercial products develops, efficient tools are required to simulate device dynamics and assess structural performance. An integrated methodology is developed for studying the dynamics of thin film bifurcating structures. Results are presented for a generic thin film structure, which exhibit classical electro-mechanical hysteresis. Such structures c...