INTRODUCTION Micro Electro Mechanical Systems (MEMS) based micro-positioning stages are critically important in many micro/nano manipulation and manufacturing applications. Such stages have been extensively used in micro-force sensors, scanning probe microscopy and micro optical lens scanners [1-4]. While there is no unique definition for a micro-positioning stage, it generally refers to a syst...

Micro motion stages are one of the essential components in field of micro robotics and ultra fine positioning systems. This research presents the optimum design of a 3-DOF micro motion stage and its position control using FEM simulation. This stage to be studied uses a 3 RRR flexure hinge base compliant mechanism driven by three piezoelectric stack actuators to provide micro scale planar motion...

This paper aims is to present the realization of a virtual model, as well as the experimental model for a mechatronic micro-positioning and micro-measuring system on two axes, OX, and OZ respectively. The paper also includes experimental results on measuring the gripping force developed between the fingers of an electrical micro-gripper, with two fingers, incorporated into the experimental mode...

Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentr...

A micro-assembling task using an image-servo positioning system is studied in this work. To improve the micro-assembling efficiency using manual operations, an image-servo automatic assembling system is established using a XYQ stepping positioning stage with a self-developed image recognition system. The circle outlines and the cross marks of the micro parts are used for this proposed system to...

Need for increased accuracy and precision in nano/micro movements and other devices (e.g. electronic, microscopy, medical etc.) has led to the development of allied technologies. The performance of these precision devices depends heavily upon accurate micro positioning of various links and joints. This has led to development of associated micro/nano mechanisms. Development of Microfactories nee...

Micro assembly is typically characterized by positioning tolerances below a few micrometers. In the case of the assembly of hybrid micro systems, such as optical systems, micro ball lenses or micro probes for measurement tasks, even positioning accuracies in the sub-micrometer range have to be achieved. The efficiency of the use of automated handling devices is strongly influenced by the flexib...

This paper presents a practical feedback controller design of a ball screw-driven table system for the microdisplacement positioning. Friction of the mechanism in the micro-displacement region has nonlinear elastic properties, unlike Coulomb and/or viscous friction in the macro-displacement, resulting in different positioning responses and frequency characteristics of the plant depending on the...

A design of a micro latching fastener – a micro “mouse trap” – is presented, which has self-closing compliant latches that clamp a free planar part inserted between them. The selfclosing of the latches is induced by the insertion of the part which releases the potential energy stored in the “cocked” state of the device, in the manner of a mouse trap. The closed latch can re-open by cocking the ...

The fiber optic sensors (FOSs) are commonly used for large-scale structure monitoring systems for their small size, noise free and low electrical risk characteristics. Embedded fiber optic sensors (FOSs) lead to micro-damage in composite structures. This damage generation threshold is based on the coating material of the FOSs and their diameter. In addition, embedded FOSs are aligned parallel t...