Micro-electric discharge machining (μ-EDM) is an important manufacturing process that is able to produce components and tools with micro-features. Improvement to this process has resulted in the use of powder mixed dielectric (PMD), which results in better surface quality and faster machining time. However, the presence of conductive powder in the dielectric fluid negatively affects the accurac...

An ultrasonic vibration has been superposed on the normal electrode movement to increase the flushing effect during a micro electro-discharge machining (EDM) process. A systematic study on the effects of ultrasonic vibration on the EDM performance for fabricating microholes in Nitinol has been completed. The introduction of ultrasonic vibration to the microEDM process has more than 60 times inc...

In recent years, advanced materials with unique metallurgical properties such as super alloys, composites and ceramics have been developed to meet the demands of extreme applications. While these materials are harder, tougher, less heat sensitive and more resistant to corrosion and fatigue, they are also difficult to machine. Advanced materials are being widely used these days not only in the a...

This paper reports on the evaluation of a high resolution micro ultrasonic machining (HR-μUSM) process suitable for post fabrication trimming of complex 3D microstructures made from fused silica. Unlike conventional USM, the HR-μUSM process aims for low machining rates, providing high resolution and high surface quality. The machining rate is reduced by keeping the micro-tool tip at a fixed dis...

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...

While ceramics are important materials for electronic and microsystem packaging, they are difficult to pattern lithographically. LEEDUS, a fabrication process combining lithography, electroplating, batch mode micro electro-discharge machining (µEDM) and batch mode micro ultrasonic machining (µUSM), is presented in this paper. This technology provides die-scale pattern transfer capability from l...

This paper reports a self-aligned three-dimensional process (3D-SOULE) that incorporates batch-mode micro ultrasonic machining (μUSM), lapping and micro electro-discharge machining (μEDM) for fabrication of concave and mushroom-shaped spherical structures from hard and brittle materials. To demonstrate the process, 1 mm structures are fabricated from glass and ruby spheres. The μEDM technique i...

Ultrasonic machining (USM) is a mechanical material removal process used to erode holes and cavities in hard or brittle work pieces by using shaped tools, high-frequency and an abrasive slurry. This paper addresses the concept and development of an expert system (ES) for hard and brittle material, such as glass, quartz, diamond, carbides, semi conducting materials, ceramic and graphite which ca...