Invited Talks (Alphabetical order) Gerardo Adesso (University of Nottingham, UK) Relativistic Quantum Metrology

Metrology has a stigma of being non-productive and in many cases the aim of production engineers is to reduce metrology costs to an absolute minimum. This paper analyzes the role of metrology in production and demonstrates, how metrology can generate value. It illustrates different ways to evaluate the benefit of metrology and gives metrologists guidance to sell metrology with economic argument...

The operational cost of 300mm wafer production is significantly greater than that of 200mm fabs. Real-time monitoring of product can save time and money through reduced scrap and decreased cycle time. Current process monitoring generally incorporates stand-alone metrology, which is time consuming and requires excessive wafer handling by production operators. The benefits of integrated metrology...

We show how a generalized quantum metrology protocol can be implemented in a twomode Bose-Einstein condensate of n atoms, achieving a sensitivity that scales better than 1/n and approaches 1 /n^'^ for appropriate design of the condensate.

Measurements play a fundamental role in nowadays forensic activities, especially in criminal justice. Guilt or innocence and the severity of a sentence do often depend upon the results of measurements. On the other hand, it is well-known that measurement results are always affected by uncertainty, so that any decision based on measurement results carries an implicit risk of being wrong: uncerta...

Research in nanoelectronics poses new challenges for metrology, but advances in theory, simulation and computing and networking technology provide new opportunities to couple simulation and metrology. This paper begins with a brief overview of current work in computational nanoelectronics. Three examples of how computation can assist metrology will then be discussed. The paper concludes with a ...

Risk and cost must be balanced in the design of semiconductor processing metrology. More specifically, one needs to balance the cost of operating the metrology tool, and the loss in terms of processing cost and yield due to the limited sampling and the time lapse between the occurrence and the correction of a process fault. In virtual metrology (VM), the real-time data produced by the processin...