Of crucial importance to the thin film process engineer is an understanding of the parameters which affect the film thickness distributions which may be obtained from magnetron sources. This paper describes how variations in source design, target erosion and source-to-substrate distance affect observed uniformities from a magnetron source. A simple method of simulating magnetron sources using t...

This paper describes the design of an X-Band Magnetron to Linear Accelerator (LINAC) High Power Transfer System consisting in an 8 resonant cavities Magnetron connected to a dedicated vacuum Dielectric Window (DW). A main analytical design of devices is shown with compact formulas and is followed by numerical optimization. Electromagnetic and Thermomechanical coupling between these devices is d...

The objective of the present study is to investigate spectral purity of a CW magnetron for a microwave power transmission system of Solar Power Satellites, or other radio applications. Oscillation spectra of a 2.45GHz oven magnetron were measured and the purity of the spectra is discussed. A filament-off magnetron has narrow bandwidth. In some conditions, however, the oscillation spectrum has F...

Two different types of H sources are operated at DESY: a magnetron source and an RF-driven volume source. H sources for HERA have to run for long uninterrupted periods with a low duty factor and a high reliability. There are now 15 years of experience with the magnetron and 6 years with the RF-driven volume source. Several improvements are under test for our RF-driven volume source. The status ...

The Magnetron is one of the efficiency high-power microwave source, although the energy conversion efficiency decreases with pulsed-power relativistic electron beam. We study the capability to increase energy conversion efficiency of Relativistic Magnetron by using Transparent Cathode. The Transparent-Cathode consists of independent cathode strips. Each cathode strip caused azimuthal magnetic f...

Magnetron sputtering is a widely used physical vapor deposition technique for deposition and formation of nanocatalyst thin films and clusters. Nevertheless, so far only few studies investigated this formation process at the fundamental level. We here review atomic scale molecular dynamics simulations aimed at elucidating the nanocatalyst growth process through magnetron sputtering. We first in...

Reactive co-sputtering is a means to create films of customized or graded index of refraction. This gives the optical coating designer new options, and enables practical realization of new classes of coatings. Two neighboring targets may be sputtered such that material from both targets and reactive gas are incident on the workpiece, depositing a film consisting of a compound. For example, if o...

We report microwave emission measurements from an inverted relativistic magnetron comprising an outer cylindrical field emission cathode and an inner coaxial anode with embedded vane resonators. The magnetron operates in the w mode at a frequency of %3.6GHz, and voltages of 1-2MV. The RF power is %500MW.

This original work treats the feasibility study of new type of high voltage power supply with a character six-phase for a magnetron 800 Watts-2450 MHz per phase for industrial microwave generators. The design of this new power supply uses a new sex identical single-phase high voltage transformer with magnetic leakage flux, coupled in star. Each single phase supply a cells which multiples the vo...

The total energy flux in a high power impulse magnetron sputtering (HiPIMS) plasma has been measured using thermal probes. Radial flux (parallel to the magnetron surface) as well as axial flux (perpendicular to the magnetron surface) were measured at different positions, and resulting energy flux profiles for the region between the magnetron and the substrate are presented. It was found that th...