Abstract—A novel dual-pulse actuation voltage has been proposed to reduce dielectric charging in micro-electromechanical system (MEMS) switch, leading to a longer switch lifetime. Mathematical and transient circuit models have been utilized to simulate dielectric charging in the RF MEMS switch, enabling the analysis of charge built-up at the switch dielectric and substrate brought about by the ...

This paper studies theuncertain nonlinear dynamics of a MEMS optical switch addressing electrical, mechanical and optical subsystems. Recently, MEMS optical switch has had significant merits in reliability, control voltage requirements and power consumption. However, an inherent weakness in designing control for such systems is unavailability of switch position information at all times due to t...

RF MEMS capacitive switches capable of orderof-magnitude impedance changes have demonstrated operating lifetimes exceeding 100 billion switching cycles without failure. In situ monitoring of switch characteristics demonstrates no significant degradation in performance and quantifies the charging properties of the switch silicon dioxide film. This demonstration leads credence to the mechanical r...

1.0 INTRODUCTION Solid-state RF devices are currently utilized in a wide array of application areas, including satellite communications systems, wireless communications systems, automotive radars, and defense applications. Currently, PIN diode or Field Effect Transistor (FET)-based switches are utilized for their high switching speeds, high power handling, low drive voltage, low cost, and techn...

MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...

In this brief a new low actuation voltage RF MEMS switch is presented which can be integrated and controlled with available CMOS technologies. Despite the advantages in the design of RF MEMS switches designing a low actuation voltage RF MEMS switch is still a challenging task. To overcome this problem, a small size RF MEMS switch utilizing a moving plate with multiple holes supported by a low s...

MEMS optical switch technology is one of the key technologies in Wavelength Division Multiplexing (WDM) optical networks. Although the 2-D MEMS optical switch technology is mature, the commonly used crossbar architecture is not amenable to building large switches. In this paper, we propose a design of 2 × 2 switching modules, and use it to build large 2-D MEMS optical switches with architecture...