This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combin...

This paper represents a MEMS based gyroscope to measure orientation. Silicon-micro-machined gyro is fabricated on the basis of resonators and they use vibrating mechanical element to sense rotation. The vibratory measurement can be done by measuring the change in capacitance with respect to the voltage or force applied in particular axis. Here MEMS based gyroscope has been designed from Lame mo...

We present two oscillation control algorithms for resonant sensors such as vibratory gyroscopes. One control algorithm tracks the resonant frequency of the resonator and the other algorithm tunes it to the specified resonant frequency by altering the resonator dynamics. Both algorithms maintain the specified amplitude of oscillations. The stability of each of the control systems is analyzed usi...

The design, development and performance evaluation of a novel radio frequency microelectromechanical systems (MEMS) gyroscope, based on a surface acoustic wave resonator (SAWR) and a surface acoustic wave sensor is presented in this paper. Most of the MEMS gyroscopes based on silicon vibratory structures that utilize the energy transfer between the two vibratory modes demand small fabrication t...

Fabrication defects and perturbations affect the behavior of a vibratory MEMS gyroscope sensor, which makes it difficult to measure the rotation angular rate. This paper presents a novel adaptive approach that can identify, in an online fashion, angular rate and other system parameters. The proposed approach develops an online identifier scheme, by rewriting the dynamic model of MEMS gyroscope ...

Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy a...

MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and mechanical components in the scale of microns. Due to its small size, low cost, low power consumption and high efficiency, MEMS technology has been widely used in many fields. In this paper, a novel comb-driven, differential capacitance sensing MEMS vibratory gyroscope based on glass-silicon-glass...

This paper presents a MPC (Model Predictive Control) algorithm for MEMS vibratory gyroscopes based on force-balancing control strategy. In the proposed MPC method, using a set of orthonormal basis functions named Laguerre functions, a new prediction and optimization technique is designed. To enhance the capability of proposed MPC method for tracking time-varying reference trajectories, first a ...

Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and an electrical circuit for self-oscillation and angular-rate detection. Since the MEMS device and c...