in this paper metal-assisted chemical etching has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer. in order to define silicon nanostructures, metal-assisted chemical etching (mace) was carried out with silver catalyst. provided solution (or materiel) in combination with laser interference lithogr...

We use a combination of several different types of lithography to generate Bragg-grating devices. In interference lithography, two coherent laser beams are crossed, generating a standing-wave interference pattern. This standing-wave pattern is used to expose photoresist, yielding a coherent deep-submicron-period grating. This grating can be used directly as the device grating or it can serve as...

Production of metrologically accurate interference patterns with subnanometer fidelity requires precise control of beam position and angle. We consider the beam stability requirements for the cases of interference by plane and spherical waves. Interferometers using beamsplitter cubes and diffraction gratings are among the analyzed topologies. The limitations of spatial filtering to remove angul...

Laser interference lithography is an established fabrication technique for periodic arrays such as photonic crystals (PCs). In this paper, we report the fabrication of a TiO2-organic hybrid periodic array by nanosecond laser interference lithography. TiO2organic hybrid films were prepared from titanium tetra-n-butoxide and 2-(methacryloyloxy) ethyl acetoacetate (MEAcAc) by the sol–gel method. T...

The interest in micro- and nano-devices based on biodegradable polymers for in vivo applications is growing rapidly and the key to these applications lies in the fashioning of features analogous to the size of cells. This paper presents fabrication techniques for leveraging micro- and nanostructures on biodegradable polymers. Innovative approaches such as replication molding, laser interference...

Interference lithography IL has proven itself to be an enabling technology for nanofabrication. Within IL, issues of spatial phase distortion, fringe stability, and substrate development have been explored and addressed. However, IL tools are still unnecessarily expensive, large, and complex. To address these issues, the authors previously built a simple IL tool that used a blue laser diode to ...

This article describes an accurate subPico flowmeter bifurcatedin to liquid and gas flowrates less than 1mol/s for both MEMS/NEMS and cryogenic technology applications. The MEMS/NEMS are described as either two Gauges (instrument), or quartz fluctuating forks, even if the liquid or gas flows through an element, as well as cryogenic technology consisting of arrays of e...