The creation of low resistivity, ultrashallow source/drain regions in MOS device structures requires rapid thermal processing (RTP) techniques that restrict diffusion and activate a significant percentage of the implanted dopant species. While current heating techniques depend upon illumination based heating, a new technology, electromagnetic induction heating (EMIH), achieves a rapid heating o...

A set of 2D steady state finite element numerical simulations of electromagnetic fields, eddy currents distribution and induction heating pattern has been done for different thicknesses of ametal workpiece. Comparison between the calculation results show the importance of workpiece thickness on induction heating process including electromagnetic field distribution, eddy currents pattern, heatin...

More rapid increases in the pH value and hardness during electromagnetic heating of a pan of water were observed than when the pan was heated by LNG or LPG. The water quality changed universally in several tap water samples across Japan. This quality change was closely correlated with the rate of temperature increase, irrespective of heating by electromagnetic induction, LNG or LPG.

Low pressure ~,10 mTorr! inductively coupled plasma sources are being developed for etching and deposition of semiconductors and metals. In models for these devices, plasma dynamics are typically coupled to the electromagnetic fields through Ohm’s law, which implies that collisional heating is the dominant power transfer mechanism. In this article, we describe an algorithm to couple plasma dyna...

thermal recovery involves well-known processes such as steam injection (cyclic steam stimulation, steam drive, and steam-assisted gravity drainage), in situ combustion, and a more recent technique that consists of heating the reservoir with electrical energy. when high frequency is used for heating, it is called electromagnetic (em) heating. the applications of em heating for heavy-oil reservoi...

The thermosphere is subject to additional electric and magnetic forces, not important in the middle and lower atmosphere, due to its partially ionized atmosphere. The effects of charged particles on the neutral atmospheric dynamics are often parameterized by ion drag in the momentum equations and Joule heating in the energy equation. Presented in this paper are a set of more accurate parameteri...

Absorption of electromagnetic irradiation results in significant heating of metallic nanoparticles, an effect which can be advantageously used in biomedical contexts. Also, metallic nanoparticles are presently finding widespread use as handles, contacts, or markers in nanometer scale systems, and for these purposes it is essential that the temperature increase associated with electromagnetic ir...

Induction heating is a widespread industrial technique and a subject of scientific research. The application fields of induction heating increase due to development of modern industrial technologies and advantages of the induction heating process. The development of traditional induction heating system applications for melting or through heating is mainly to increase power or production rates o...

A novel heating technique, electromagnetic induction heating (EMIH), uses electromagnetic radiation, ranging in frequency from a few megahertz to tens of gigahertz, to volumetrically heat silicon above 1000 C in only a few seconds. Typical power requirements fall between 900 to 1300 W for silicon wafers 75 to 100 mm in diameter. This technique has successfully produced direct silicon wafer-to-w...

Centrifugal deposition of iron oxide was performed to manufacture magnetic nanorods in an aqueous solution. The nanorods were examined by electron microscopy. The diameter of the nanorods ranges from 10 to 20 nm. The length is about 150 nm. The nanorods were incorporated into a silicone polymer to simulate body tissues injected with magnetic nanomaterials. Then the magnetic nanorod-containing s...