While the traditional and popular realm of polymer synthesis is the liquid phase, the use of vapor-based techniques to deposit polymers has been met with increasing interest over the past decades. The perhaps most relevant example, the deposition of poly(p-xylylenes) via the Gorham process, has been of industrial use in the fabrication of isolating or protective coatings in electronics and biom...

Most conventional chemical vapor deposition (CVD) systems do not have the spatial actuation and sensing capabilities necessary to control deposition uniformity, or to intentionally induce nonuniform deposition patterns for single-wafer combinatorial CVD experiments. In an effort to address this limitation, a novel CVD reactor system has been developed that can explicitly control the spatial pro...

We introduce a new chemical vapor deposition (CVD) process that can be used to selectively deposit materials of many different types. The technique makes use of the plasmon resonance in nanoscale metal structures to produce the local heating necessary to initiate deposition when illuminated by a focused low-power laser. We demonstrate the technique, which we refer to as plasmon-assisted CVD (PA...

Thermal conductivity of multiwalled carbon nanotubes ~CNT’s! prepared using a microwave plasma chemical vapor deposition system is investigated using a pulsed photothermal reflectance technique. We find that the average thermal conductivity of carbon nanotube films, with the film thickness from 10 to 50 mm, is around 15 W/m K at room temperature and independent of the tube length. Taking a smal...

Related Articles Thermal annealing effect on material characterizations of β-Ga2O3 epilayer grown by metal organic chemical vapor deposition Appl. Phys. Lett. 102, 011119 (2013) Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends J. Appl. Phys. 113, 021301 (2013) Crystallinity of inorganic films grown by atomic layer deposition: Overview and general tr...

We demonstrated experimentally that graphene-Cu-graphene heterogeneous films reveal strongly enhanced thermal conductivity as compared to the reference Cu and annealed Cu films. Chemical vapor deposition of a single atomic plane of graphene on both sides of 9 μm thick Cu films increases their thermal conductivity by up to 24% near room temperature. Interestingly, the observed improvement of the...

Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techn...