MicroElectroMechanical Systems for Radio Frequency applications (i.e. RF-MEMS) show very good performance and characteristics. However, their employment within large-scale commercial applications is still limited by issues related to the reliability of such components. In this work we present the Finite Element Method (FEM) modelling and preliminary experimental results concerning an active res...

The presence of oscillations in a control loop increases the deviations from the set point of the process variables, thus causing inferior products, larger rejection rates, increased energy consumption and reduced average throughput. There are several reasons for oscillations in control loops. They may be caused by excessively high controller gains, oscillating disturbances or interactions, but...

Five different procedures commonly used to rinse and dry released microstructures are compared: evaporation drying with deionized (DI) water or methanol, sublimation drying with t-butyl alcohol orp-dichlorobenzene, and supercritical drying with COz. For objectivecomparison, identical test structures, made by the MCNC Multi-User EMS Processes (MUMPS), are used in evaluating the drying techniques...

In the last decade new actuator designs have been presented trying to introduce at mechanical level the advantages of compliance. Ranging from serial elastic actuators to different designs of variable stiffness actuators, various prototypes have been proposed and implemented on robots, thus allowing performance of novel and challenging tasks. Nevertheless some of these new devices often are aff...