Automated force measurement is one of the most important technologies in realizing intelligent automation systems. However, while many methods are available for micro-force sensing, measuring large three-dimensional (3D) forces and loads remains a significant challenge. Accordingly, the present study proposes a novel 3D force sensor based on a parallel mechanism. The transformation function and...

An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sensor and a temperature sensor. The integrated multifunction micro-sensor is fabricated on silicon ...

Sensing using specific and selective receptors provides two very different but complementary strategies. This Sensor Issues article will discuss the merits and challenges of specific sensors, and selective sensors based on synthetic arrays. We will examine where each has been successfully applied to a sensing challenge, and then look at how a combined approach could take elements of both to pro...

The silicon based pressure sensor is one of the major applications of the piezoresistive sensor. This paper focuses on the structural design and optimization of the MEMS piezoresistive pressure sensor to enhance the sensitivity. A finite element method (FEM) is adopted for designing the performance of a silicon based piezoresistive pressure sensor. Thermal as well as pressure loading on the sen...

In this work, we investigate sensor design approaches for eliminating the effects of parasitic resistance in nanowire and nanoribbon biosensors. Measurements of pH with polysilicon nanoribbon biosensors are used to demonstrate a reduction in sensitivity as the sensor length is reduced. The sensitivity (normalised conductance change) is reduced from 11% to 5.5% for a pH change from 9 to 3 as the...

A ZnO gas sensor was successfully prepared by RF sputtering. The maximum sensitivity of the sensor for vinegar test application was at 400oC. The ZnO based sensor showed good sensitivity for vinegar test in the concentration range of 4% to 9%. The work reveals the ability of using ZnO gas sensor to determine the acid concentrations of the vinegars for food requirements.

Ethanol (C2H6O) sensitivity of zinc oxide (ZnO) thin film has been studied in present work. Semiconductor thin films of zinc oxide (ZnO) were deposited onto alkali-free glass substrates by the sol–gel method and dip-coating technique. The ZnO sol was synthesized by dissolving zinc acetate dehydrate in ethanol, and then adding Tetra ethanol-amine.  The as-coated films were preheated at 150 ºC fo...