Lead-based ternary-chalcogenide thin films of the (PbTe)1−x(PbS)x system were obtained using plasma-enhanced chemical-vapor-deposition (PECVD) technique under conditions a nonequilibrium low-temperature argon plasma an RF discharge (40.68 MHz) at reduced pressure (0.01 Torr). High-purity elements directly used as starting materials, namely Pb, S and Te. Plasma–chemical synthesis was carried out...

In this study, silicon nitride (SiNx) thin films were deposited on polyimide (PI) substrates as barrier layers by a plasma enhanced chemical vapor deposition (PECVD) system. The gallium-doped zinc oxide (GZO) thin films were deposited on PI and SiNx/PI substrates at room temperature (RT), 100 and 200 °C by radio frequency (RF) magnetron sputtering. The thicknesses of the GZO and SiNx thin films...

Vertical graphene (VG) sheets were single-step synthesized via inductively coupled plasma (ICP)-enhanced chemical vapor deposition (PECVD) using waste lard oil as a sustainable and economical carbon source. Interweaved few-layer VG sheets, H₂, and other hydrocarbon gases were obtained after the decomposition of waste lard oil. The influence of parameters such as temperature, gas proportion, ICP...

The fabrication of high-capacity, binder-free Li–ion battery anodes using a simple and efficient manufacturing process was reported in this research. anode material for lithium–ion batteries utilized is combination two-dimensional (2D) carbon nanowalls (CNWs) Cu nanoparticles (improved rate performance capacity retention) or Si (high capacity) nanoparticles. A methane (CH4) hydrogen (H2) gas mi...

The present research addresses the synthesis of carbon materials thin films by RF-PECVD in N2/CH4 gas mixture. Carbon film was formed at 40/48 sccm CH4/N2 total flow rate ratio CH4/CH4+N2 = 0.45 and 200/100 W HF/LF power a deposition temperature 350 oC 1000 mTorr pressure. Then, post-annealing took place 400 means RTA under N2 flow. formation nanostructures investigated scanning electron micros...

Aligned carbon nanotubes have been grown using microwave plasma enhanced chemical vapor deposition (PECVD). The carbon nanotubes are nucleated from iron catalyst particles which, during growth, remain adherent to the silicon substrates. By analysis with high-resolution electron microscopy, we observe iron silicide roots penetrating into the silicon substrate at the interface of the catalyst par...

Characterization was performed on the application of atomic layer deposition (ALD) of hafnium dioxide (HfO2) and aluminum oxide (Al2O3), and plasma-enhanced chemical vapor deposition (PECVD) of silicon nitride (Si3N4) as metal–insulator–metal (MIM) capacitor dielectric for GaAs heterojunction bipolar transistor (HBT) technology. The results show that the MIM capacitor with 62 nm of ALD HfO2 res...

Electrospray is the technique to soft-ionize liquids by applying a high electric potential to a liquid meniscus. The liquid meniscus is deformed into a cone [1], and charged species are emitted from its apex. The emission can be solvated ions, charged droplets, or a mix of the two. This low-divergence charged species source can be used in diverse applications such as mass spectrometry, propulsi...