Using standard microelectromechanical system (MEMS) processes to coat a microcantilever with a piezoelectric layer results in a versatile transducer with inherent self-sensing capabilities. For applications in multifrequency atomic force microscopy (MF-AFM), we illustrate that a single piezoelectric layer can be simultaneously used for multimode excitation and detection of the cantilever deflec...

Considerable interest has been devoted to converting mechanical energy into electricity using polymer nanofibres. In particular, piezoelectric nanofibres produced by electrospinning have shown remarkable mechanical energy-to-electricity conversion ability. However, there is little data for the acoustic-to-electric conversion of electrospun nanofibres. Here we show that electrospun piezoelectric...

In this study, we develop a clamped-clamped beam-type piezoelectric vacuum pressure sensing element. The clamped-clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end. An input voltage is applied to a pair of electrodes to vibrate the piezoelectric beam, and the output voltage is measured at the other pair. Because the viscous fo...

This paper studied and realized a flexible nanogenerator based on P(VDF-TrFE) nanofibers and PDMS/MWCNT thin composite membrane, which worked under triboelectric and piezoelectric hybrid mechanisms. The P(VDF-TrFE) nanofibers as a piezoelectric functional layer and a triboelectric friction layer are formed by electrospinning process. In order to improve the performance of triboelectric nanogene...

Structural health monitoring (SHM) systems operate online and test different materials using ultrasonic guided waves and piezoelectric smart materials. These systems are permanently installed on the structures and display information on the monitor screen. The user informs the engineers of the existing damage after observing signal loss which appears after damage is caused. In this paper health...

First, a brief review of available classes of piezoelectric materials (in particular emergent piezoelectric single crystals) and specific requirements for medical imaging applications is made. Several piezoelectric materials are retained for two specific applications (50 MHz high frequency single element transducer and high density 2D array) to simulate and compare the overall transducer perfor...

The reference electronic skin is a sensor array based on PVDF (Polyvinylidene fluoride) piezoelectric polymers, coupled to a rigid substrate and covered by an elastomer layer. It is first evaluated how a distributed normal force (Hertzian distribution) is transmitted to an extended PVDF sensor through the elastomer layer. A simplified approach based on Boussinesq's half-space assumption is used...

Ferroelectric oxides are of continuing interest in a new generation of electronic devices, such as piezoelectric actuators and nonvolatile memory devices. In general, their application involves manipulation of the polarization of the ferroelectric and the polarization depends sensitively on boundaries and interfaces. Here we study the dynamic interaction during polarization switching of domains...

This work describes a novel architecture to realize high-performance gallium nitride (GaN) bulk acoustic wave (BAW) resonators. The method is based on the growth of a thick GaN layer on a metal electrode grid. The fabrication process starts with the growth of a thin GaN buffer layer on a Si (111) substrate. The GaN buffer layer is patterned and trenches are made and refilled with sputtered tung...

We demonstrate a water-immersible thin film lead zirconate titanate, Pb(Zr,Ti)O3, [PZT] actuator, without special passivation layer, towards in-vivo or in-vitro scanning probe microscope (SPM) measurements of living cells in water or biological fluids. In order to be water-immersible, the electrodes need to be electrically insulated and the piezoelectric layer needs to be protected against dire...